MAE/CIMS join seminar Microsystems in Delft: From Simple Devices to Working Systems
Work on silicon sensors began in Delft in the 1970’s. At that time Simon Middelhoek first proposed the idea of smart silicon sensors. This was to combine the sensor with the electronics, which presented many advantages. Initially, this idea was rejected by many in industry, but we have now seen the benefit of this idea in research and many commercial applications. In some cases the whole sensor can be fabricated. Using a small cleanroom, Delft produced a range of new devices. These included the first devices using thermopiles for sensor for flow, vacuum and IR. A new cleanroom was built in 1988 which allowed many new developments in integrated devices. As the field grew, equipment was developed specifically for microsystem technology. From humble beginnings the silicon sensor has now become an essential part of our daily lives. Although silicon is an excellent base material for a wide range of sensors, there is increasing interest in other materials which are combined with silicon or in some cases, replace silicon all together. This presentation will trace the path in Delft from those early days to the sophisticated devices we see today. This has involved using the developments in the IC industry and adapting them to fit our needs.
Prof. Paddy French received his B.Sc. in mathematics and M.Sc. in electronics from Southampton University, UK, in 1981 and 1982, respectively. In 1986 he obtained his Ph.D., also from Southampton University, which was a study of the piezoresistive effect in polysilicon. After 18 months as a post doc at Delft University, The Netherlands, he moved to Japan in 1988. For 3 years he worked on sensors for automotives at the Central Engineering Laboratories of Nissan Motor Company. He returned to Delft University in May 1991 and became staff member of the Laboratory for Electronic Instrumentation In 1999 he was awarded the Antoni van Leeuwenhoek chair and was from 2002 to 2012 head of the Electronic Instrumentation Laboratory. In 2019 he moved to the Bioelectronics Laboratory. He was Editor-in-chief of Sensors and Actuators A and General Editor of Sensors and Actuators A&B from 2001 to 2018. He is fellow of the IEEE and the IAAM. His research interests are integrated sensor systems, micromachining, in particular for medical applications.