IEEE EDS MEMS Seminar/Webinar Series - Piezoelectric Thin Film Hybrid Transducers
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Aluminum nitride (AlN) and aluminum scandium nitride (AlScN) thin film-based piezoelectric devices are widely implemented in thin-film bulk acoustic resonators (FBAR), piezoelectric micromachined ultrasonic transducers (PMUT), and phononic integrated circuits (PnIC). High Sc-doped AlScN thin film and deposition process advances to larger electromechanical coupling K2, which enables wideband piezoelectric resonators, ferroelectric tunable devices, and transducers. In this talk, we will report recent developments on AlScN thin film process, acoustic transducers, such as acoustic delay lines (ADL), photoacoustic imaging (PAI), as well as emerging research fields.
Tao Wu is currently a tenured Associate Professor, Principle Investigator (PI) at School of Information Science and Technology, ShanghaiTech University, Shanghai, China. He received the B.S. degree in Electrical Engineering from Zhejiang University, in 2007, and Ph.D. degrees from the University of California at Los Angeles, in 2011, respectively. Dr. Wu joined ShanghaiTech in 2017 and established Shanghaitech Microsystem And noveL transducer Laboratory (SMALL). Dr. Wu’s research interests include design and fabrication of chip-scale hybrid piezoelectric transducers, microsystem and AI4IC. He has authored or co-authored more than 100 papers in prestigious journals and conferences.