Recently, 5G and IoT have sparked great research interest in developing the next generation front ends that can meet the more stringent requirements on performance, frequency scalability, bandwidth, power consumption, and spectral utilization efficiency. Micro-electro-mechanical-system, a technology inspired by microelectronics, can offer new means of signal processing between electrical, mechanical, and optical domains to support higher and wider communication frequency bands.
This talk will discuss several new types of RF microsystems that can enable various front-end functions, including filtering, reference, and modulation, with unprecedented size, weight, and performance for 5G and beyond. Specifically, the most recent development on lithium niobate MEMS resonators, filters, and hybrid microsystems from several GHz to 60 GHz will be first presented and followed by the discussion on cross-cutting acoustics and electromagnetics to miniaturize packed size without compromising their performance. He will also discuss a promising platform for photonic integrated circuits based on MEMS technology to achieve a monolithic solution for wideband electro-optic modulator, acousto-optics modulator, tunable photonic filters, and acoustic resonance photodetectors. The future research directions of these subtopics will also be included.